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    Plasma Sprayed Coatings of High-Purity Ceramics for Semiconductor and Flat-Panel-Display Production Equipment

    High-purity oxide ceramic powders of alumina (Al2O3) and yttria (Y2O3) have been developed to apply to semiconductor and flat-panel-display (FPD) production equipment. The ceramic coatings on the inside chamber w...

    Junya Kitamura, Hiroyuki Ibe, Fumi Yuasa… in Journal of Thermal Spray Technology (2008)