Skip to main content

and
  1. No Access

    Article

    Tuning Electrical Properties and Achieving High TCR in P-Doped a-SixC1−x:H Films

    In this study, the characteristics of phosphorus-doped hydrogenated amorphous silicon carbide prepared by radio-frequency glow discharge decomposition of a mixture of silane (SiH4), methane (CH4) and hydrogen (H2

    D. F. Valencia-Grisales, C. Reyes-Betanzo in Journal of Electronic Materials (2024)