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  1. No Access

    Article

    Tuning Electrical Properties and Achieving High TCR in P-Doped a-SixC1−x:H Films

    In this study, the characteristics of phosphorus-doped hydrogenated amorphous silicon carbide prepared by radio-frequency glow discharge decomposition of a mixture of silane (SiH4), methane (CH4) and hydrogen (H2

    D. F. Valencia-Grisales, C. Reyes-Betanzo in Journal of Electronic Materials (2024)

  2. No Access

    Article

    Design and simulation of a piezoelectric micropump for drug delivery systems

    In this paper a piezoelectric micropump to be used in a drug delivery system is presented, for the specific application of providing synthetic lacrimal fluid to people suffering from dry eye disease. The propo...

    Mauricio Calderon, C. Reyes-Betanzo in Microsystem Technologies (2023)

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    Article

    Stress Reduction of Amorphous Silicon Deposited by PECVD

    Amorphous silicon (α-Si) was deposited on glass substrates by PECVD at different deposition conditions in order to characterize the residual stress on the film. Subsequently, a thermal-annealing was applied fo...

    César B. Pérez, C. Reyes-Betanzo in MRS Online Proceedings Library (2016)

  4. No Access

    Article

    Characterization of Residual Stress in a-SiC:H Deposited by RF-PECVD for Manufacturing of Membranes for Cell Culture

    Hydrogenated amorphous silicon carbide (a-SiC:H) was deposited by radiofrequency-plasma enhanced chemical vapor deposition (RF-PECVD) on monocrystalline silicon substrates with different process parameters in ...

    O. Gelvez- Lizarazo, C. Reyes-Betanzo in MRS Online Proceedings Library (2016)