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    Investigation of Lo-Hi-Lo and Delta-Doped Silicon Carbide Structures

    Feasibility of lo-hi-lo and delta-doped structures for evaluation of high-field silicon carbide material properties is investigated. Delta-doped structures are grown using the hot-wall CVD technique. Aluminum ...

    A. Konstantinov, S. Karlsson, C. Adås, C. Harris… in MRS Online Proceedings Library (2011)