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Preface of EML PVSEC-25 special issue
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Control of point defects in the Cu(In,Ga)Se2 film synthesized at low temperature from a Cu/In2Se3 stacked precursor
Low-temperature fabrication of Cu(In,Ga)Se2 (CIGS) film is essential for flexible CIGS solar cells. A large-grained CIGS film was synthesized with a Se-deficient Cu/In,Ga)2Se3 stacked precursor by reacting at 500...
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Article
Effects of NH3 flow rate on the epitaxial growth of CoSi2 thin film using a CoN x interlayer deposited by MOCVD
A uniform epitaxial CoSi2 layer could be grown on a Si(100) substrate by deposition of a CoN x interlayer followed by an in situ annealing process. The amorphous Si–N layer whic...
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Article
Fabrication of a high-performance poly-Si thin-film transistor using a poly-Si film prepared by silicide-enhanced rapid thermal annealing process
A 50-nm thick polycrystalline Si film was fabricated by the crystallization of anamorphous Si film using silicide-enhanced rapid thermal annealing (SERTA). The amorphous Si film was deposited on a 5-nm thick p...
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Chapter
Development of High-Efficiency Cd-Free Cu(In,Ga)Se2 Solar Cells Using Chemically Deposited ZnS Film
A ZnS film covered completely the CIGS surface without pinholes. The thickness of the ZnS film could be controlled according to the cycle number of the CBD process. As the thickness of the ZnS film increased, ...
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Article
Fabrication of CuInSe2 Solar Cells by the Evaporation of Binary Selenide Compounds
CuInSe2 films were prepared by the three-stage process using the evaporation of In2Se3, Cu2Se and Se. In the third stage, the depth of Cu-poor surface region was precisely adjusted by the control of the evaporati...
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Article
Enhanced Low-Temperature Crystallization of Amorphous Si Films Using AlCl3 Vapor
It is known that the direct contact between Al and a-Si enhances the crystallization of a-Si film. But the poly-Si films crystallized by the direct contact of Al metal film suffer the problems of rough surface...
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Article
Crystallization of Amorphous Si Thin Films Using a Viscous Ni Solution
We prepared a viscous Ni solution by dissolving NiCl2 in 1N HCl and mixing it with propylene glycol to control the amount of Ni on Si surface. A uniform film was formed after spin coating and oven dry. The a-Si f...
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Article
In-situ Growth and Growth Kinetics of Epitaxial (100) CoSi2 Layer on (100) Si by Reactive Chemical Vapor Deposition
Uniform epitaxial CoSi2 layers have been grown in situ on a (100) Si substrate at temperatures near 600 °C by reactive chemical-vapor deposition of cyclopentadienyl dicarbonyl cobalt, Co(η5-C5H5)(CO)2. The growth...
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Article
Silicon Field Emission Arrays Coated with CoSi2 Layer Grown by Reactive Chemical Vapor Deposition
We prepared Si emitters coated with an MOCVD CoSi2 layer to improve the emission properties. The CoSi2 layer was grown in situ by reactive chemical vapor deposition of cyclopentadienyl dicarbonyl cobalt at 650 °C...
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Article
Properties of Polysilicon films Oxidized in Inductively Coupled Plasma and its Effect on thin-Film Transistors
We investigated the properties of polycrystalline silicon (poly-Si) films oxidized in inductively coupled plasma (ICP) and the characteristics of poly-Si thin film transistors (TFTs) with an ICP/LPCVD gate oxi...
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Article
Epitaxial Growth and Thermal Stability of CoSi2 Layer on (100) Si from Co-C Films without Cap** Layer
A uniform epitaxial CoSi2 layer was grown on (100) Si substrate by rapid thermal annealing at 800°C in N2 ambient without cap** layers from an amorphous cobalt-carbon film. The amorphous cobalt-carbon film was ...
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Article
Reexamination of sectional classification in far easternEuphorbia subgenusEsula (Euphorbiaceae) using morphological and phenolic data
Reexamining the classification proposed by Hurusawa, the phylogeny of Far EasternEuphorbia subgenusEsula was analyzed using thirteen morphological and seventeen phenolic compound data. These data were analyzed in...
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Article
Pre-Treatment Effect on Aluminum Thin Films Deposition from Cvd Using Dimethylethylamine Alane
To study the effect of pre-treatment of substrates on the deposition behavior of Al films, the surfaces of TiN and SiO2 substrates were exposed to hydrogen plasma or Ar plasma before Al deposition. The Al films w...
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Article
Thin-Film Transistors Fabricated With Poly-Si Films Crystallized by Microwave Annealing
Solid phase crystallization has the advantages of low cost and excellent uniformity but the crystallization temperature is too high to use glass as a substrate. Using microwave annealing, we crystallized a-Si ...
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Article
Low-Temperature Crystallization of Amorphous Silicon Thin Films by Microwave Heating
Microwave heating was utilized for the first time for solid phase crystallization of amorphous silicon films. Microwave heating lowered annealing temperature and reduced the annealing time for complete crystal...
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Article
Effect of Geometric Factors on Polarization Properties of Vertical-Cavity Surface-Emitting Lasers With Tilted Pillar Structures
We have studied the effect of geometric factors on the polarization properties of verticalcavity surface-emitting lasers with tilted pillar structures. Laser pillars with circular, square, diamond, and rectang...
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Stabilization of Transverse Mode Emission in Vertical-Cavity Surface-Emitting Lasers by Deposition of High Refractive Index Amorphous GaAs
We report successful application of a low-temperature-grown amorphous GaAs (a-GaAs) layer for stabilization of the fundamental transverse mode of InGaAs/GaAs vertical-cavity surface-emitting lasers. The maximu...
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Article
Copper-Enhanced Solid Phase Crystallization of Amorphous Silicon Films
Low-temperature crystallization of amorphous Si (a-Si) films was investigated by adsorbing copper ions on the surface of the films. The copper ions were adsorbed by spincoating of Cu solution. This new process...
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Article
Effect of CdTe Stoichiometry on the Electrical Properties of CdTe Films
CdTe films have been prepared by a close-spaced sublimation (CSS) process with screen-printed CdTe layers as a source. The electrical resistivity of the CdTe film deposited in O2 was about one order of magnitude ...