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    Multiwafer Movpe of III-Nitride Films for Led and Laser Applications

    Process for mass production of GaN and its related alloys, InGaN and AlGaN, have been optimized to achieve high device yield and low cost of ownership. Here we present some of the latest results obtained from ...

    R. Beccard, O. Schoen, B. Schtneller, D. Schmitz… in MRS Online Proceedings Library (1997)