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    Characterization and Integration in Cu Damascene Structures of AURORA, an Inorganic Low-k Dielectric

    AURORA films, which have a Si-O-Si network with–CH3 terminations, were characterized and integrated into Cu single damascene structures. The relatively low carbon concentration (∼ 20%) and the very small pore ...

    R. A. Donaton, B. Coenegrachts, E. Sleeckx, M. Schaekers… in MRS Online Proceedings Library (2000)