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1. The Sputtering Technique

   In this chapter, the formation of ferroelectric films using the sputtering technique is described. A main topic is a mass production system...

   Koukou Suu in Ferroelectric Random Access Memories

   Chapter
   

2. Sputtering

   Sputtering techniques are of great importance for both academic research and commercial applications. This chapter summarizes the fundamentals of the...

   Bernd Rauschenbach in Low-Energy Ion Irradiation of Materials

   Chapter 2022
   

3. Temperature Dependences of the Sputtering of Negative Silicon Cluster Ions

   Abstract

   The temperature dependences of the sputtering of negative ions of dimers and trimers of a Si(111) single crystal upon bombardment with cesium...

   B. G. Atabaev, R. Dzabbarganov, ... A. S. Khalmatov in Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

   Article 01 December 2023
   

4. Fabrication of smooth SAC305 thin film via magnetron sputtering

   SAC305 (96.5 wt% Sn, 3 wt% Ag, 0.5 wt%Cu) solder is increasingly becoming popular due to its reliability good characteristics and performance in...

   M. Ojha, A. A. Elmustafa in Journal of Materials Science: Materials in Electronics

   Article Open access 08 June 2024
   

5. Structural and magnetic properties of micropolycrystalline cobalt thin films fabricated by direct current magnetron sputtering

   Pure cobalt (Co) thin films were fabricated by direct current magnetron sputtering, and the effects of sputtering power and pressure on the...

   Kerui Song, Zhou Li, ... Qian Lei in International Journal of Minerals, Metallurgy and Materials

   Article 17 February 2024

6. Nanomechanical properties of Nb films deposited by pulsed frequency magnetron sputtering

   The fabrication of niobium-based devices requires precision and reliability and, consequently, the characterization and description of their...

   J. G. Medrano, J. Raboño-Borbolla, ... F. J. Flores-Ruiz in Journal of Materials Science

   Article 23 September 2023
   

7. Tungsten Sputtering Yields by Light Impurities of Plasma

   Abstract —

   Calculations of the tungsten sputtering yields (the divertor material in the ITER tokamak) by He, Be, N, and O—impurity atoms in the...

   V. S. Mikhailov, P. Yu. Babenko, A. N. Zinoviev in Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

   Article 01 April 2024
   

8. NiAl Coatings Produced by Magnetron Sputtering from Mosaic Targets

   In this study, NiAl-based intermetallic films were obtained by magnetron sputtering of mosaic targets, consisting of nickel and aluminum. Two-segment...

   T. S. Ogneva, A. A. Ruktuev, ... I. A. Bataev in Journal of Materials Engineering and Performance

   Article 21 March 2023
   

9. 2D and thin-film copper synthesized via magnetron sputtering

   Two-dimensional metals have gained great attention in recent years. However, most of these metals possess relatively strong chemical bonding in three...

   Bin Gu, Guangyu Wen, ... Tomas Wagner in MRS Communications

   Article 12 February 2024
   

10. Recent Developments and Applications of TiN-Based Films Synthesized by Magnetron Sputtering

    Magnetron sputtering is a plasma-based Physical Vapor Deposition technique for synthesis of surface coatings. In the present survey, we have...

    Sayan Atta, U. NarendraKumar, ... Sitaram Dash in Journal of Materials Engineering and Performance

    Article 24 May 2023
    

11. Surface Metallization of Glass Fiber (GF) / Polyetheretherketone (PEEK) Composite with Cu Coatings Deposited by Magnetron Sputtering and Electroplating

    Surface metallization of glass fiber (GF) / polyetheretherketone (PEEK)[GF/PEEK] is conducted by coating copper using electroplating and magnetron...

    Li Zhong, Fanya **, ... Min Dan in Journal of Wuhan University of Technology-Mater. Sci. Ed.

    Article 17 January 2024

12. Review on mechanical and functional properties of refractory high-entropy alloy films by magnetron sputtering

    Refractory high-entropy films (RHEFs), as multi-component materials, have garnered significant attention due to their potential use in...

    Mohamed El Garah, Driss Soubane, Frederic Sanchette in Emergent Materials

    Article Open access 30 December 2023
    

13. Modulating nanostructures in metals by magneton sputtering

    Here, we report an effective nanostructures modulation strategy by W alloying and annealing treatment in Cu films deposited by magnetron sputtering....

    Pengyan Mao, Zhao Cheng, ... Kai** Tai in MRS Communications

    Article 10 May 2023
    

14. Improved poisoning resistance of Cu-coated LaNiAl alloy prepared by magnetron-sputtering method

    To enhance the poisoning resistance of LaNiAl, high-purity Cu-coated LaNiAl was prepared using magnetron sputtering. SEM, EDS, and TEM were employed...

    Fei Yu, Lei Hao, ... Zhengsheng Fu in Journal of Materials Science: Materials in Electronics

    Article 24 April 2023
    

15. Synthesis mechanism from graphene quantum dots to carbon nanotubes by ion-sputtering assisted chemical vapor deposition

    We present the first work of the synthesis mechanism from graphene quantum dots (GQDs) to carbon nanotubes (CNTs) by an ion-sputtering assisted...

    Jun Mok Ha, Seoung Ho Lee, ... Sunmog Yeo in Discover Nano

    Article Open access 07 May 2024
    

16. Sputtering of Metal Atoms with the Wake Potential Excited by an Electron Beam

    Abstract

    The process of metal-atom sputtering during a corona discharge is considered. When an electron moves in a medium at some velocity, charge...

    N. P. Kalashnikov in Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

    Article 01 April 2023

17. An Investigation by Monte Carlo Simulation of the Sputtering Process in Plasma

    Abstract

    Thin film technology is still develo** and needs many improvements to comply with industrial demands. Several parameters contribute to the...

    Bouazza Abdelkader in Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

    Article 18 October 2023
    

18. Selective Sputtering of Eurofer Steel by Deuterium Plasma

    Abstract

    The selective sputtering of reduced-activation ferritic-martensitic steel Eurofer upon deuterium plasma irradiation with ion energy of 100 eV...

    A. V. Golubeva, B. I. Khripunov, ... E. V. Kukueva in Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques

    Article 03 August 2022
    

19. Optimization of the Deposition Process Parameters of DC Magnetron Sputtering to Achieve Desired Deposition Rate Using Design of Experiment Method

    In a DC magnetron sputtering system, the deposition rate is significantly affected by the sputtering power and working pressure, and the precise...

    Allamula Ashok, Vir Karan, ... Satyesh Kumar Yadav in Journal of Electronic Materials

    Article 04 August 2023
    

20. Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering

    Because of their favorable sensitivity in chemical environments, zinc oxide (ZnO) materials are widely used in gas sensing. This study performed...

    Shao-Hwa Hu, Yen-Sheng Lin, ... Ya-Zhao Ai in Journal of Electronic Materials

    Article 02 March 2024