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1. Etch Mechanism of AlN Thin Film in Cl₂/Ar Inductively Coupled Plasma

   The etching characteristics of aluminum nitride (AlN) were investigated with the etch rate of AlN thin film and the selectivity of AlN to SiO ₂ in an...

   Jong-Chang Woo, Dong-Pyo Kim, Gwan-Ha Kim in Transactions on Electrical and Electronic Materials

   Article 04 August 2022
   

2. Reactive magnetron sputtered AlN thin films: structural, linear and nonlinear optical characteristics

   This study investigates the structural and optical characteristics of aluminum nitride (AlN) thin films deposited using reactive magnetron sputtering...

   Haifa A. Alyousef, A. M. Hassan, Hesham M. H. Zakaly in Journal of Materials Science: Materials in Electronics

   Article 04 May 2023
   

3. Design and Fabrication of Indium Tin Oxide Based Thin Film Piezoresistive Pressure Sensor

   The design and development of Indium Tin Oxide (ITO) thin film based piezoresistive pressure sensor is presented in this paper. ITO (90:10)...

   S. Mala, H. K. E. Latha, A. Udayakumar in Experimental Techniques

   Article 05 January 2024
   

4. Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering

   Aluminium nitride (AlN) thin film is a very attractive material to be used in electronic devices, and the most popular AlN orientations that have...

   A. S. Bakri, N. Nafarizal, ... A. Aldalbahi in Journal of Materials Science: Materials in Electronics

   Article 19 April 2022
   

5. Effect of interfacial structure on peel strength between Cu and AlN bonded with a Mg–Ti co-deposited film

   Eliminating electrochemical migration of Ag is effective for improving the long-term reliability of power modules for high-voltage applications. In...

   Nobuyuki Terasaki, Naochika Kon, ... Tohru Sekino in Discover Materials

   Article Open access 16 April 2023
   

6. Revealing dynamic-mechanical properties of precipitates in a nanostructured thin film using micromechanical spectroscopy

   Abstract

   Nanostructured materials with their remarkable properties are key enablers in many modern applications. For example, industrial dry-milling...

   Markus Alfreider, Michael Meindlhumer, ... Daniel Kiener in MRS Bulletin

   Article Open access 25 June 2023
   

7. Micro- and Nanostructure Analysis of Vapor-Phase-Grown AlN on Face-to-Face Annealed Sputtered AlN/Nanopatterned Sapphire Substrate Templates

   Micro- and nanostructures in vapor-phase-grown AlN on face-to-face annealed sputtered AlN (FFA Sp-AlN) templates formed on nanopatterned sapphire...

   Yudai Nakanishi, Yusuke Hayashi, ... Akira Sakai in Journal of Electronic Materials

   Article 29 March 2023
   

8. Thermal Performance of AlN-Coated High-Power LED Optimized Using Taguchi Statistical Approach

   Effective cooling leads to the integration of nanoscale coating and electronic components in light-emitting diode (LED) modules, because their...

   Chien-Chung Liu, Maw-Tyan Sheen, ... Ming-Der Jean in Journal of Electronic Materials

   Article 17 March 2023
   

9. Investigation of performance enhancement of a recessed gate field-plated AlGaN/AlN/GaN nano-HEMT on β-Ga₂O₃ substrate with variation of AlN spacer layer thickness

   In this research article, a recessed field-plated gate AlGaN/GaN-based nano-high electron mobility transistor (HEMT) grown on a β-Ga ₂ O ₃ substrate is...

   G. Purnachandra Rao, Trupti Ranjan Lenka, ... Hieu Pham Trung Nguyen in Journal of Materials Science: Materials in Electronics

   Article 29 June 2023
   

10. Structural, mechanical and corrosion resistance of phosphorus-doped TiAlN thin film

    Doped TiAlN thin films are gaining unprecedented attention in recent times due to their functionality and tuneable properties to meet specific...

    Olayinka O. Abegunde, Mohammed Makha, ... Jones Alami in Journal of Materials Science

    Article 12 October 2022
    

11. Analysis of dielectric, impedance and electrical properties of interfacial layer: AlN

    The purpose of this study is to investigate the electric and dielectric properties of Au/Ti/AlN/n-Si device with using admittance measurements....

    D. E. Yıldız, A. Tataroglu in Journal of Materials Science: Materials in Electronics

    Article 28 April 2023
    

12. Determination of Property Differences Between Mg-Zn Mono and Multilayered Thin Film Metallic Glasses

    Due to the advantage of crystalline defectless nature, thin film metallic glasses (TFMGs) are worth to focus on their behavioral differences. Besides...

    Murat Akbulut, Mehmet Karakan in Journal of Materials Engineering and Performance

    Article 22 May 2024
    

13. High-quality AlN growth: a detailed study on ammonia flow

    High crystalline and optical quality aluminum nitride (AlN) films with thin thickness have been grown on Al ₂ O ₃ by MOVPE (metal-organic vapor phase...

    Gamze Yolcu, Merve Nur Koçak, ... Ilkay Demir in Journal of Materials Science: Materials in Electronics

    Article 25 January 2023
    

14. Laser Lift-Off of the Sapphire Substrate for Fabricating Through-AlN-Via Wafer Bonded Absorption Layer Removed Thin Film Ultraviolet Flip Chip LED

    In this study we report chip fabrication process that allows the laser lift-off of the sapphire substrate for the transfer of the GaN based thin film...

    Anil Kawan, Soon Jae Yu in Transactions on Electrical and Electronic Materials

    Article Open access 15 February 2021
    

15. Detection of cyanogen (NCCN) on Ga-, In-, and Tl-doped aluminium nitride (AlN) nanotube: insights from quantum chemical calculations

    Cyanogen gas has been reported to be poisonous and poses a great threat to human life when been exposed to its high concentration. Hence, the need to...

    Obinna C. Ngana, Terkumbur E. Gber, ... Hitler Louis in Journal of Nanoparticle Research

    Article 06 February 2024
    

16. Tunable sensitivity of zirconium oxynitride thin-film temperature sensor modulated by film thickness

    ZrO _x N _y thin films with different thicknesses were deposited on sapphire substrates using DC magnetron reactive sputtering. The electrodes were then...

    Yanjie Li, Minmin You, ... **gquan Liu in Journal of Materials Science: Materials in Electronics

    Article 27 August 2022
    

17. Investigation on the magnetic properties and microstructures of FeCoAlN thin films deposited by do** AlN ceramic chips

    The soft magnetic properties, microstructures, and high-frequency characteristics of (Fe _70.6 Co _29.4 ) _{100− x} Al _x –N ( x = 8.0–31.0 at.%) thin films were...

    Fu Zheng, Zeyu Han, ... Hua Gao in Journal of Materials Science: Materials in Electronics

    Article 07 May 2022
    

18. Parylene C-AlN Multilayered Thin-Film Passivation for Organic Light-Emitting Diode Using a Single Deposition Chamber

    Abstract

    Poly-para-xylylene C (Parylene C) and Aluminium Nitride (AlN) multilayered thin films using a single chamber are proposed to achieve...

    Akpeko Gasonoo, Jeong-Hwan Lee, ... Jae-Hyun Lee in Electronic Materials Letters

    Article 25 July 2020
    

19. Effects of Pre-Metallization on the MOCVD Growth and Properties of Ge-doped AlGaN on AlN/Sapphire Templates

    The effects of pre-metallization of the growth surface on film stress and structural properties of undoped and Ge-doped Al _x Ga _1−x N ( x ~ 0.5–0.6)...

    Timothy Mirabito, Ke Wang, Joan M. Redwing in Journal of Electronic Materials

    Article 12 December 2022
    

20. Improved energy storage performance of P (VDF-TrFE-CFE) films by growing superficial AlN insulation Layer

    Ferroelectric polymers, such as PVDF and its copolymers, have attracted much attention because of their high dielectric constants, which exhibit...

    Peng Liu, Tiandong Zhang, ... Changming Li in Journal of Materials Science: Materials in Electronics

    Article 22 February 2023