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Article
Characterization and dressing effect of CMP diamond disc conditioner with ordered abrasive distribution
With the advent of the 5G information age, the production and processing of computer chips have attracted people’s attention. In order to adapt to the rapid development in the field of chip manufacturing, high...
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Article
Modeling and experimental study on a deburring method of micro slots of Ti6Al4V tubes with ultra-small-grinding (USG) tool
The micro structures milled on Ti6Al4V tubes are so narrow that to be damaged in deburring by conventional methods. In this study, a deburring method for the top burrs on micro slots of Ti6Al4V tubes was propo...
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Article
Modeling and experimental study on the grinding performance of precision diamond grinding tool with defined texture
Because of the random distribution of diamond abrasive grains on the surface and the obstruction of chip flow during processing, conventional grinding tool cannot meet the requirements of the machining precisi...
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Article
Surface generation mechanism in ultra-fine microgrinding (UMG) of single crystal silicon considering grinding tool topography
Ultra-fine microgrinding (UMG) with tool diameter of about 100 μm is a promising processing method in producing microstructures, but its service life has always been an important factor restricting its develop...
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Article
Modeling and experimental study on the edge chip** of monocrystalline silicon in ultra-micro-slot-grinding (UMSG) with ultra-micro-grinding (UMG) tools with diameters ~ 100 µm
The edge chip** of monocrystalline silicon in ultra-micro-slot-grinding (UMSG) was investigated. A critical condition model which predicts the appearance of edge chip** and a prediction model which predict...
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Article
Research on a novel fabricating method of diamond grinding tool with defined grain arrangement
Grain-arranged grinding tool refers to a kind of grinding tool in which the position of abrasive grains on grinding tool can be controlled artificially. In this paper, a new method for fabrication of grain-arr...
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Article
Modeling and experimental study of different discontinuous micro-grinding tools
In this paper, two different types of discontinuous micro-grinding tools are designed and fabricated, which respectively are straight-type effective units (STR) tool and screw-type effective units (SC) tool, a...
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Article
Vibration-assisted wire electrochemical micromachining with a suspension of B4C particles in the electrolyte
The micron-level machining gap of wire electrochemical micromachining (WECMM) makes it difficult to remove the electrolytic products, which always get deposited on the surface of the wire cathode. Usually, an ...