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  1. No Access

    Article

    Surface generation mechanism in ultra-fine microgrinding (UMG) of single crystal silicon considering grinding tool topography

    Ultra-fine microgrinding (UMG) with tool diameter of about 100 μm is a promising processing method in producing microstructures, but its service life has always been an important factor restricting its develop...

    Jun Wu, Jue Wang, Chunmi Liu, Zhaozhi Guo… in The International Journal of Advanced Manu… (2022)

  2. No Access

    Article

    Modeling and experimental study on the edge chip** of monocrystalline silicon in ultra-micro-slot-grinding (UMSG) with ultra-micro-grinding (UMG) tools with diameters ~ 100 µm

    The edge chip** of monocrystalline silicon in ultra-micro-slot-grinding (UMSG) was investigated. A critical condition model which predicts the appearance of edge chip** and a prediction model which predict...

    Kefeng Song, Chunmi Liu, Jue Wang… in The International Journal of Advanced Manu… (2022)