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    Al/Ni And Al/Ti Ohmic Contact To P-type SiC Diffused Layer

    Ohmic contacts to p-type SiC were fabricated by depositing Al/Ni and Al/Ti followed by high temperature annealing. A p-type layer was fabricated by Al or B diffusion from vapor phase into both p-type and n-typ...

    Xaiobin Wang, Stanislav Soloviev, Ying Gao, G. Straty… in MRS Online Proceedings Library (2011)