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  1. No Access

    Article

    News from the M in CMP - Viscosity of CMP Slurries, a Constant?

    It is well known and accepted that the viscosity of CMP-slurries has an effect on polishing results. Even though the literature on rheology recognizes that viscosity is not always constant and the slurry can s...

    W. Lortz, F. Menzel, R. Brandes, F. Klaessig, T. Knothe… in MRS Online Proceedings Library (2003)

  2. No Access

    Article

    Modified Abrasives based on fumed SiO2 and Al2O3 for the Cu CMP Process

    New abrasive particles based on SiO2 and Al2O3 were produced with different coating and do**. Seven specifically designed particles were dispersed to prepare slurries for Cu CMP. Glycin was used as complexing a...

    D. Zeidler, J. W. Bartha, W. Lortz, R. Brandes in MRS Online Proceedings Library (2004)