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  1. No Access

    Article

    Improved Methods for Evaluation of Rapid Thermal Processors

    SEMATECH has worked with numerous commercial suppliers of RTP systems on both evaluation and development projects. It has adopted standardized methods which minimize monitor wafer impact and improve system cha...

    Tony Speranza, Jim Nakos, Val Medina, Sanjay Banerjee… in MRS Online Proceedings Library (1997)

  2. No Access

    Article

    Commercial RTP - A Sematech Perspective

    This paper discusses various commercial aspects of Rapid Thermal Processing (RTP). It provides an overview of SEMATECH’s efforts to improve the manufacturing viability of RTP. Over the past several years SEMAT...

    Tony Speranza, Terry Riley, Arun Nanda, Burt Fowler… in MRS Online Proceedings Library (1996)