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    Effects of modulation frequency on the structure and electrical characteristics of μc-Si:H films prepared by pulsed VHF-PECVD

    Modulation frequency and pulse duty cycle are two key parameters of pulsed VHF-PECVD technology. An experimental study on the microcrystalline silicon materials prepared by pulsed VHF-PECVD technology in high ...

    Shi-feng Wang 王世峰, **ao-dan Zhang 张晓丹, Ying Zhao 赵颖… in Optoelectronics Letters (2009)