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    Chapter and Conference Paper

    Observation of Dopant Distribution in Compound Semiconductors Using Off-axis Electron Holography

    This paper describes a method to map dopant distributions in compound semiconductors by off-axis electron holography. A cross-sectional transmission electron microscopy (TEM) specimen with n+, nāˆ’ and p gallium...

    H Sasaki, S Ootomo, T Matsuda, K Yamamoto… in Microscopy of Semiconducting Materials 2007 (2008)