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  1. No Access

    Article

    Stability of the nitrogen-deficient Ti2AlN x MAX phase in Ar2+-irradiated (Ti,Al)N/Ti2AlN x multilayers

    The effects of 100 keV Ar2+ ion irradiation on the structure and stability of multilayered dc sputtered and annealed thin films of (Ti,Al)N/Ti2AlN x have been investigated with ...

    M. Bugnet, T. Cabioc’h, V. Mauchamp, Ph. Guérin, M. Marteau… in Journal of Materials Science (2010)

  2. No Access

    Article

    Intrinsic stress and alloying effect in Mo/Ni superlattices: a comparison between ion beam sputtering and thermal evaporation

    Epitaxial Mo(110)/Ni(111) superlattices were grown on (112 0) single-crystal sapphiresubstrates, by ion beam sputtering (IBS) and thermal evaporation (TE), in order to investigate the role of deposited energy ...

    A. Debelle, G. Abadias, A. Michel, C. Jaouen, Ph. Guérin… in MRS Online Proceedings Library (2006)

  3. No Access

    Article

    Stress-field in Sputtered Mo Thin Films and Mo/Ni Superlattices: Origin and Evolution after Ion-Irradiation

    In the present study the ion irradiation technique is used to investigate the origin of the stress-field in Mo layers grown by ion beam sputtering. Strain measurements were performed by X-ray Diffraction (XRD)...

    A. Debelle, G. Abadias, A. Michel, C. Jaouen, Ph. Guérin… in MRS Online Proceedings Library (2003)

  4. No Access

    Chapter and Conference Paper

    Fabrication of Multilayer Mirror Zone Plates and Gratings for Use with Soft X-Rays

    Multilayer mirror gratings and Fresnel zone plates were produced using a multistep process utilizing microfabrication techniques. The gratings were generated by holography and the zone plates by electron beam ...

    C. Khan Malek, T. Moreno, H. Berrouane, J. M. Andre, Ph. Guérin… in X-Ray Microscopy III (1992)