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    Article

    Diffusion and Distribution of Photoacid Generators in thin Polymer Films

    Distribution and diffusion of two fluorinated ionic photoacid generators (PAGs) in thin polymer films have been investigated by depth profiling of the intrinsic label elements of both the PAGs and a silicon co...

    Qinghuang Lin, Marie Angelopoulos, Katherina Babich in MRS Online Proceedings Library (1999)

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    Article

    A New High Performance CA Resist for E-beam Lithography

    Three major lithographic applications have emerged for electron beam exposure tools: optical mask fabrication, direct writing for device fabrication, and more recently projection e-beam printing. The tradition...

    Ranee Kwong, Wu-Song Huang, Wayne Moreau, Robert Lang in MRS Online Proceedings Library (1999)

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    Article

    Solvent, LICL, and Temperature Effects on the Morphological Structure and Electronic Properties of Polyanhjne

    Extensive gel permeation chromatography coupled with surface structure measurements clearly indicate that polyaniline (pani) base has a tendency to aggregate as a result of interchain hydrogen-bonding. The agg...

    Marie Angelopoulos, Yun−Hsin Liao, Bruce Furman in MRS Online Proceedings Library (1995)

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    Article

    Water Soluble Poly Anilines: Properties and Applications

    A new class of water soluble conducting polyanilincs have been developed. This is accomplished by oxidatively polymerizing aniline monomers on a template such as a polymeric acid. The resulting polyanilines re...

    Marie Angelopoulos, Niranjan Patel, Jane M. Shaw in MRS Online Proceedings Library (1993)

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    Article

    Low Stress, High Resolution Photosensitive Polyimide Based on a BPDA/PDA/6FDAm Copolymer

    A novel series of BPDA/PDA/6FDAm polyimide copolymers have been developed. These materials are more flexible, soluble, and more optically transparent than the homopolymer BPDA/PDA. A negative acting PSPI has b...

    Marie Angelopoulos, Jeff Gelorme, Sally Swanson in MRS Online Proceedings Library (1993)

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    Applications of Conducting Polyanilines in Computer Manufacturing Processes

    Polyaniline is found to be suitable for a number of applications in computer manufacturing processes. In particular, polyaniline can play significant roles in the lithographic processes used to fabricate integ...

    Marie Angelopoulos, Niranjan Patel in Intrinsically Conducting Polymers: An Emer… (1993)

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    Article

    Polyanilines: In Situ Radiation and Thermal Induced Do**

    Onium salts and amine triflate salts decompose upon exposure to radiation or thermal treatment respectively to generate protonic acids. These salts can be blended with polyaniline and upon decomposition the re...

    Marie Angelopoulos, Jane M. Shaw, Kam-Leung Lee in MRS Online Proceedings Library (1990)