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Article

Analytical and numerical modeling of squeeze-film dam** in perforated microstructures

The literature includes a variety of analytical and semi-analytical models to describe squeeze-film dam** in MEMS perforated structures. Even if many of them have been validated by means of numerical simulat...

Salvatore Nigro, Leonardo Pagnotta, Maria F. Pantano in Microfluidics and Nanofluidics (2012)