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Article
Open AccessA C-shaped hinge for displacement magnification in MEMS rotational structures
The design, analysis, fabrication, and characterization of two distinct MEMS rotational structures are provided; these structures include a classical symmetrical lancet structure and a novel symmetrical C-shap...
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Article
Multiphysics design and implementation of a microsystem for displacement-controlled tensile testing of nanomaterials
MEMS-based tensile testing devices are powerful tools for mechanical characterization of nanoscale materials. In a typical configuration, their design includes an actuator to deliver loads/displacements to a s...
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Article
Analytical and numerical modeling of squeeze-film dam** in perforated microstructures
The literature includes a variety of analytical and semi-analytical models to describe squeeze-film dam** in MEMS perforated structures. Even if many of them have been validated by means of numerical simulat...
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Article
Mechanical characterization of materials at small length scales
A review on the mechanical characterization of materials at small length scale is presented. The focus is on the different micro- and nanoscale testing techniques, the variety of materials investigated by the ...