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Article
Stability of the nitrogen-deficient Ti2AlN x MAX phase in Ar2+-irradiated (Ti,Al)N/Ti2AlN x multilayers
The effects of 100 keV Ar2+ ion irradiation on the structure and stability of multilayered dc sputtered and annealed thin films of (Ti,Al)N/Ti2AlN x have been investigated with ...
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Article
Thermal Conductivity Measurements of Thin Amorphous Silicon Films by Scanning Thermal Microscopy
Thermal conductivity measurements of thin amorphous silicon films performed with a micro-thermistance mounted on an atomic force microscope are presented. A specific thermal model is implemented, and an identi...