Page
%P
![Loading...](https://link.springer.com/static/c4a417b97a76cc2980e3c25e2271af3129e08bbe/images/pdf-preview/spacer.gif)
-
Article
Growth stresses and viscosity of thermal oxides on silicon and polysilicon
Stresses in thermally grown SiO2 films on silicon have traditionally been determined by substrate curvature measurements. This technique is useful for studying stresses in thin films, but it cannot be used to inv...
-
Article
Scrub Typhus Pneumonitis Acquired through the Respiratory Tract in a Laboratory Worker