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    Chapter and Conference Paper

    Multiscale Modeling of the Implantation and Annealing of Silicon Devices

    Process simulators for silicon devices are benefiting from recent work on several models that cover vastly different length and time scales. In this talk we will focus on molecular dynamics (MD) and Monte Carl...

    G. H. Gilmer, L. Pelaz, C. Rafferty… in Simulation of Semiconductor Processes and … (1998)