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    Lift -Off Process to get Free-Standing High Quality Single Crystal Diamond Films and Suspended Single Crystal Diamond Devices

    Freestanding and suspended single crystal diamond devices, micro disks and beam structures, have been fabricated on single crystal diamond substrates using a lift-off process employing ion implantation followe...

    Jie Yang, F. C. Wang, L. E. Hu, E. Butler James in MRS Online Proceedings Library (2007)