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    Epitaxial growth of LiNb03 thin films by excimer laser ablation method and their surface acoustic wave properties

    We have formed epitaxial LoNb03 thin films on sapphire substrates (001),(110) and (012) using an excimer-laser ablation technique. We have fabricated surface acoustic wave (SAW) filters on the films and evaluated...

    Yoshihiko Shibata, Klyoshi Kaya, Kageyasu Akashi… in MRS Online Proceedings Library (1992)