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Optimization of doped lanthanated tungsten components in ion sources by determining the temperature profile for halogen processes
Lanthanated tungsten (WL) has been commonly used in ion sources to prevent wear and prolong life when using fluorinated dopant gases. In particular, germanium tetrafluoride (GeF4) is a process gas that produces a...
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Article
Numerical simulation of process dynamics during laser beam drilling with short pulses
In the last years, laser beam drilling became increasingly important for many technical applications as it allows the contactless production of high quality drill holes. So far, mainly short laser pulses are o...