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    Open Access

    Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

    We developed a newly designed system based on in situ monitoring with Fourier transform infrared (FT-IR) spectroscopy and quadrupole mass spectrometry (QMS) for understanding decomposition mechanism and by-pro...

    Jong-Ki An, Eunmi Choi, Seob Shim, Hayeong Kim, Goru Kang… in Nanoscale Research Letters (2020)

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