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Article
Electrochemical Growth of Cu(Ru) Films via Underpotential Deposition of Pb, Surface-Limited Redox Replacement of Cu, and Underpotential Deposition of Ru
Copper alloy films can be potentially used as an interconnect material in microelectronics when the feature sizes of the device are reduced. This work investigated Cu and Cu(Ru) films, which were deposited usi...
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Article
Effects of Additives on Electrochemical Growth of Cu Film on Co/SiO2/Si Substrate by Alternating Underpotential Deposition of Pb and Surface-Limited Redox Replacement by Cu
The effects of additives to an acidic electrolyte for electrochemical deposition of copper film to prevent corrosion of the Co/SiO2/Si substrate have been investigated. A sacrificial Pb layer was formed by underp...
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Article
Surface-Morphology-Induced Hydrophobicity of Fluorocarbon Films Grown by a Simultaneous Etching and Deposition Process
Development of facile methods to prepare hydrophobic films is of great important. We report fluorocarbon films deposited by a simple plasma-assisted chemical vapor deposition method using C3F8 and C2H2 with extra...
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Article
Optical Properties of Al x O y /Ni/Al x O y Multilayered Absorber Coatings Prepared by Reactive DC Magnetron Sputtering
Al x O y /Ni/Al x O y multilayered absorber coatings were deposited on stai...
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Article
Low-Resistivity Ru-Ta-C Barriers for Cu Interconnects
Ru-Ta-C films deposited on silicon substrates were evaluated as barriers for copper metalization. The films were prepared by magnetron cosputtering using a Ru target and a Ta-C target. Compositions and structu...
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Article
The Transparent Conductive Properties of Manganese-Doped Zinc Oxide Films Deposited by Chemical Bath Deposition
Manganese-doped zinc oxide (Mn-doped ZnO) thin films were prepared using chemical bath deposition (CBD), and the impacts of the manganese dopant concentration on the structure, electrical resistivity, optical ...
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Article
Optical Properties and Durability of Al2O3-NiP/Al Solar Absorbers Prepared by Electroless Nickel Composite Plating
A simple and low-cost method, electroless nickel composite plating, was used to deposit an Al2O3-NiP composite coating on an Al substrate to form an Al2O3-NiP/Al solar absorber. The effects of the Al2O3 content i...
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Article
Enhancement of Oxidation Resistance and Electrical Properties of Indium-Doped Copper Thin Films
Copper thin films with high conductivity and good resistance to electromigration can be used in advanced electronic devices. However, the poor corrosion resistance of copper must be overcome. This work elucida...
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Article
Barrier Properties of Amorphous Binary Ta-Ni Thin Films for Cu Interconnection
Highly thermally stable amorphous Ta x Ni1–x (x = 0.25 and 0.75) thin films were deposited on Si and Si/SiO2 substrate by magnetron dc sputtering, and th...
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Article
Structural and Passivative Behaviors of Cu(In) Thin Film
This investigation prepares a low-resistivity and self-passivated Cu(In) thin film. The dissociation behaviors of dilute Cu-alloy thin films, containing 1.5–5at.%In, were prepared on glass substrates by a cosp...
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Article
Crystallization and failure behavior of Ta-TM (TM=Fe, Co) nanostructured/amorphous diffusion barriers for copper metallization
This work examined the thin-film properties and diffusion barrier behavior of sputtered Ta-TM (TM=Fe, Co) films, aiming at depositing a highly crystallization-resistant and conductive diffusion barrier film fo...
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Article
Crystallization and failure behavior of Ta-Ni nanostructured/amorphous diffusion barriers for copper metallization
This work examines the thin-film properties and diffusion barrier behavior of sputtered Ta-Ni films, aiming at depositing highly crystallization-resistant and conductive diffusion barriers for Cu metallization...
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Article
Electric properties of barium–strontium titanate thin films deposited by two-step radio-frequency sputtering
Barium-strontium titanate (BST) thin films were prepared by a two-step deposition using radio-frequency magnetron sputtering on Pt/Ti/SiO2-buffered Si(100) substrate. The initial BST layer thickness and intermedi...
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Article
Colcemid effects on homologue pairing and crossing over during fetal mouse oogenesis
Colcemid was administered to gestational day 13 female mice to test effects on homologue pairing, synapsis and recombination of fetal oogenesis. Pairing abnormalities were detected in pachytene oocytes by ligh...
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Article
Cytological observations of deletions in pachytene stages of oogenesis and spermatogenesis in the mouse
Cytological examination of pachytene stages of oogenesis and spermatogenesis revealed the presence of diagnostic loops in cells heterozygous for each one of six radiation induced lethal albino alleles in the m...
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Article
A cytogenetic analysis of oocytes from Macaca mulatta and Nemestrina matured in vitro
Cytogenetic analysis of first and second metaphase configurations of oocytes from M. mulatta and M. nemestrina matured in vitro were carried out. 76 diakinesis/metaphase I cells from M. mulatta obtained after 19–...