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Article
Electrical properties of Mg x Zn1−x O thin films deposited by using RF magnetron co-sputtering with ZnO and Mg0.3Zn0.7O targets
We successfully deposited hexagonal wurtzite Mg x Zn1−x O (0 ≤ x ≤ 0.18) films on Si substrates by using RF magnetron co-sputtering with ZnO and M...
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Article
Effects of in content on the microstructure and the roughness of ZnO:In films
We investigated the changes in the preferred orientation and microstructure of ZnO:In films with increasing In content. ZnO and ZnO:In films with In contents of up to 50 at.% were deposited on Si (111) substra...
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Article
Stability characteristics of gallium-doped zinc-tin-oxide thin-film transistors fabricated using a sol-gel method
We investigated the incorporation of Ga into zinc-tin-oxide (ZTO) thin-film transistors (TFTs) and assessed the TFTs’ electrical and stability properties. The Ga-doped ZTO (ZTO:Ga) thin films were deposited on...
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Article
Effects of Mg incorporation by co-sputtering into the ZnO channel layer of thin-film transistors
We fabricated a series of ZnO-based thin-film transistors (TFTs) in which the Mg composition ratio in the active layer was varied by controlling the RF power applied to the ZnO and the Mg0.3Zn0.7O targets. Mg ...
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Article
Effect of buffer layers on the structural properties of PLD-grown Mg0.5Zn0.5O films on c-sapphire
This study investigated the growth conditions required for growing single-phase hexagonal Mg0.5Zn0.5O epitaxial thin-film layers over a variety of buffer layers, including ZnO, MgO, or Mg x ...
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Article
Effect of reactive gases in an atmospheric-pressure plasma for dye adsorption on ZnO nanorods
In this study, ZnO nanorods (NRs) were grown on F-doped SnO2 (FTO)/glass substrate by using a chemical bath deposition (CBD) method. The NRs were crystallized well. The surfaces of the NRs were modified using an ...
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Article
Nanopattern fabrication via AP-UVO exposure of a self-organized block copolymer
Block copolymers were used to achieve nanoscale patterning. Block copolymers, particularly polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA), produce patterns from which one block polymer may be selectiv...