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  1. No Access

    Article

    Integrated Rib Waveguide-Photodetector Using Si/Si1−xGex Multiple Quantum Wells for Long Wavelenghts

    We have investigated the structural, electrical, and optical quality of epitaxial Si and Si1−xGex films grown by MBE on SIMOX (Separation by IMplanted OXygen) silicon substrates. Epitaxial films grown on these SO...

    V. P. Kesan, P. G. May, G. V. Treyz, E. Bassous… in MRS Online Proceedings Library (1991)

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    Article

    Use of Si-YBaCuO Intermixed System for Patterning of Superconducting Thin Films

    A Si-YBaCuO intermixed system has been formed using rapid thermal annealing (RTA) of Cu/BaO/Y2O2/Si layered structures, which were deposited on MgO substrates by electron-beam evaporation. The electrical and stru...

    Q. Y. Ma, E. S. Yang, G. V. Treyz, C. Shu… in MRS Online Proceedings Library (1989)

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    Article

    Laser-Induced Atomic Chlorine Etching of Silicon

    UV laser photolysis of chlorine (λ = 350-360 nm) has been used to produce a microscopic atomic chlorine source. Crystalline silicon has been etched and deep, through-wafer vias have been fabricated. The etchin...

    G. V. Treyz, R. Scarmozzino, H. H. Burke… in MRS Online Proceedings Library (1988)

  4. No Access

    Article

    Direct-Writing of High-Aspect-Ratio Trenches in Silicon

    Deep trenches have been etched in crystalline silicon with polarization-controlled, variable-curvature walls. Scan speeds of up to 10mm/s have been demonstrated. A model of the etching process has been develop...

    G. V. Treyz, R. Beach, R. M. Osgood Jr. in MRS Online Proceedings Library (1986)