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    Thermal CVD of Amorphous Germanium Films From 2, 5-Bis (Tert.-Butyl) -2, 5-Diaza-1-Germa-Cyclopentane Organometallic Precursor

    A novel organometallic germylene precursor has been synthesized and used for the deposition of amorphous germanium by thermal OM CVD at temperatures below 300°C. The films are of high purity with an oxygen con...

    F. Glatz, J. prokop, S. Vepřek, F. R. Klingan… in MRS Online Proceedings Library (1994)