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  1. No Access

    Article

    Low cost transparent SU-8 membrane mask for deep X-ray lithography

    Deep X-ray lithography masks require good transparency and mechanical resistance to the intense synchrotron X-ray beam, large active areas (cm)2 and compatibility with the standard fabrication processes (optical ...

    S. Cabrini, F. Pérennès, B. Marmiroli, A. Olivo, A. Carpentiero… in Microsystem Technologies (2005)

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    Article

    Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process

    Pyramid wavefront sensors are the key components of new multiconjugate adaptive optics systems used for wavefront correction of terrestrial telescopes. The sensor consists of a very flat four faces pyramid mad...

    F. Pérennès, M. Ghigo, M. Tormen, S. Cabrini in Microsystem Technologies (2004)

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    Article

    Deep X-ray lithography at ELETTRA using a central beam-stop to enhance adhesion

     In the deep X-ray lithography process adhesion of resist structures on metallic coated substrate is strongly correlated with the spectral distribution of the radiation. At ELETTRA the bending magnet radiation...

    F. Pérennès, E. Vesselli, F. J. Pantenburg in Microsystem Technologies (2002)