![Loading...](https://link.springer.com/static/c4a417b97a76cc2980e3c25e2271af3129e08bbe/images/pdf-preview/spacer.gif)
-
Article
Low cost transparent SU-8 membrane mask for deep X-ray lithography
Deep X-ray lithography masks require good transparency and mechanical resistance to the intense synchrotron X-ray beam, large active areas (cm)2 and compatibility with the standard fabrication processes (optical ...
-
Article
Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process
Pyramid wavefront sensors are the key components of new multiconjugate adaptive optics systems used for wavefront correction of terrestrial telescopes. The sensor consists of a very flat four faces pyramid mad...
-
Article
Deep X-ray lithography at ELETTRA using a central beam-stop to enhance adhesion
In the deep X-ray lithography process adhesion of resist structures on metallic coated substrate is strongly correlated with the spectral distribution of the radiation. At ELETTRA the bending magnet radiation...