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    Gallium arsenide suspended microheater for MEMS sensor arrays

    This work describes the design, simulation, fabrication and characterization of a TiN/Pt microheater prepared on a GaAs micromechanical structure as a prospective device for micro-electro-mechanical system (ME...

    I. Hotovy, V. Rehacek, F. Mika, T. Lalinsky, S. Hascik… in Microsystem Technologies (2008)