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    Article

    Thickness Dependence of the Optical and Electrical Properties of Thin a-Si:H Films

    Optical and electrical properties are investigated as a function of thickness for two sets of samples of a-Si:H films deposited respectively by RF magnetron sputtering and by RF glow discharge under the same c...

    F. Demichelis, E. Mezzetti, P. Mpawenayo, A. Tagliaferro in MRS Online Proceedings Library (1986)

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    Article

    Physical Properties of Annealed a-CSiGe:H Alloys

    The optoelectronic properties of the new semiconducting alloy a-CSiGe:H have been studied with particular regard to the dependence upon deposition and annealing temperature. Infrared and electrical results are...

    F. Demichelis, G. Kaniadakis, C. F. Pirri, A. Tagliaferro in MRS Online Proceedings Library (1989)

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    Article

    Determination of the Energy Gap in Photoconducting Insulators Through Current Noise Measuremen

    Measurements of the current noise power spectrum of the photoconducting insulators CdS and CdSe irradiated with monochromatic light of different wavelength A are reported.

    A. Carbone, F. Demichelis, P. Mazzetti in MRS Online Proceedings Library (1989)

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    Article

    Diamond-Like Films As Optical And Protective Coatings

    Films of amorphous carbon (a-C) and hydrogenated amorphous carbon (a-C:H) are deposited by R.F. Magnetron Sputtering and Sputter Assisted Plasma CVD respectively and their properties are compared. It is found ...

    D. Das Gupta, F. Demichelis, R. Spagnolo, A. Tagliaferro in MRS Online Proceedings Library (1990)

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    Article

    Hydrogen Diffusion in a-Sic:H

    In order to improve our understanding of the motion of hydrogen and the mechanism by which structural changes occurr, two sets of a-SiC:H samples obtained by glow-discharge at different substrate temperatures ...

    F. Demichelis, C. F. Pirri, E. Tresso, G. Amato in MRS Online Proceedings Library (1990)

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    Article

    Photoinduced Noise in Amorphous Semiconductor Films

    Electrical noise measurements have been performed on amorphous semiconductor films under irradiation with monochromatic light at different wavelengths. The Power Spectrum Densities (PSDs) of highly photoconduc...

    F. Demichelis, C. F. Pirri, A. Tagliaferro in MRS Online Proceedings Library (1990)

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    Article

    Physical properties of amorphous silicon-carbon alloys produced by different techniques

    Results of a study of compositional, optical, electrical, and structural properties of hydrogen amorphous silicon carbide (a-SiC:H) prepared, respectively, by glow-discharge (GD) and reactive sputtering (SP) tech...

    A. Carbone, F. Demichelis, G. Kaniadakis, G. Della Mea in Journal of Materials Research (1990)

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    Article

    Correlation Between Amorphous Silicon Solar Cell Parameters and Photoinduced Current Noise Power Spectrum

    A new technique based on measurements of photoinduced current noise in amorphous silicon solar cells is reported. A l/fn (n~l) component, superimposed to a frequency independent one due to simple shot noise, is a...

    F. Demichelis, P. Rava, A. Tagliaferro in MRS Online Proceedings Library (1991)

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    Article

    a-SiC:H Doped with Reactive Gases and with Ion Implantation

    Boron doped a-SiC:H samples have been obtained both by gas phase do** during film growth and by using ion implantation. All the implanted samples were annealed under vacuum to remove the damage introduced by...

    F. Demichelis, C.F. Pirri, E. Tresso, G. Della Mea in MRS Online Proceedings Library (1991)

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    Article

    Physical Properties of Undoped and Doped Microcrystalline SiC:H Deposited by PECVD

    Experiment results on a systematic investigation on the elemental composition, structural, properties of undoped and doped microcrystalline silicon carbide films deposited by Plasma Enhanced Chemical Vapor Dep...

    F. Demichelis, C.F. Pirri, E. Tresso, G. Dellamea in MRS Online Proceedings Library (1991)

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    Article

    Characterization of the Structure of Carbon Material Through the sp3/sp2 Bonding Ratio Measurements

    Hydrogenated amorphous carbon (a-C:H) films have been deposited by sputter assisted plasma chemical vapor deposition (CVD). The relative concentration of sp3 and sp2 hybridized carbon in samples is determined by ...

    F. Demichelis, C. De Martino, C.F. Pirri, A. Tagliaferro in MRS Online Proceedings Library (1992)

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    Article

    Doped Amorphous and Microcrystalline Silicon Carbide as Wide Band-Gap Material

    As a conclusion it can be deduced that in silicon-carbon alloys high optical band-gap can be achieved both in amorphous and in microcrystalline films. In amorphous films the high band-gap is coupled to a diffi...

    F. Demichelis, C. F. Pirri, E. Tresso, P. Rava in MRS Online Proceedings Library (1992)

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    Article

    Structure and Morphology of μc-SiC:H Films Produced by Pecvd

    Films of μc-SiC:H have been deposited in a conventional PECVD system in order to investigate their structural and morphological properties. They consist of a mixed phase of Si crystallites (50-200 Å), surround...

    F. Demichelis, G. Crovini, C. F. Pirri, E. Tresso in MRS Online Proceedings Library (1992)

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    Article

    Effect of Boron and Phosphorus Ion Implantation on a-SixC1-x:H Thin Films

    Ion implantation of boron and phosphorus in device quality a-SixC1-x:H films deposited by Ultra High Vacuum Plasma Enhanced Chemical Vapor Deposition (UHV PECVD) has been performed. The effects of damage and of d...

    F. Demichelis, R. Galloni, C. F. Pirri, R. Rizzolid in MRS Online Proceedings Library (1992)

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    Article

    Effect of Plasma Treatment of the Tco on a-Si Solar Cell Performance

    Single junction a-Si p-i-n solar cells have been deposited by an Ultra High Vacuum (UHV) Multichamber PECVD system reaching an efficiency of 10.1% over 0.1 cm2 and 9.7% over 1 cm2. The effect of hydrogen treatmen...

    F. Demichelis, R. Galloni, A. Madan, C. F. Pirri, P. Rava in MRS Online Proceedings Library (1992)

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    Article

    Crystallization Processes in Amorphous Hydrogenated Silicon Based Alloys

    Amorphous and microcrystalline films of silicon and silicon carbide have been deposited by means of PECVD at low substrate temperature (200°C), with reactive gases highly diluted in H2. Devices quality a-Si:H fil...

    F. Demichelis, C. F. Pirri, E. Tresso, L. Battezzati in MRS Online Proceedings Library (1992)

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    Article

    Crystallinity and Optoelectronic Properties of μc-SiC:H

    Samples of μc-Si1−xCx:H with different degree of crystallinity and different carbon content were deposited by Plasma Enhanced Chemical Vapor Deposition and characterized by means of optical, electrical and struct...

    F. Demichelis, G. Crovini, C. Osenga, C. F. Pirri in MRS Online Proceedings Library (1992)

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    Article

    Thermal and Mechanical Properties of Diamond-Like a-C:H Films

    Diamond-like amorphous carbon and hydrogenated amorphous carbon films (DLC) prepared by rf sputtering have been characterized by means of measurements of optical gap, hardness and Young's modulus. Preliminary ...

    G. Amato, G. Benedetto, L. Boarino, F. Demichelis in MRS Online Proceedings Library (1992)

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    Article

    Influence of Carbon on Structural, Optical and Electrical Properties of Microcrystalline Silicon Carbide.

    Microcrystalline films of SiC:H have been deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) of SiH4+CH4+H2 mixtures with high power density and high H2 dilution, at variable CH4/SiH4 ratios. Their el...

    F. Demichelis, C.F. Pirri, E. Tresso, G. DellaMea in MRS Online Proceedings Library (1992)

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    Article

    Study on Structural, Electrical and Optical Properties of Microcrystalline Si:H and SiC:H Films

    We report results on a study on μc-Si.H and μc-SiC:H films deposited by PECVD. The crystallinity fraction and the crystal sizes have been evaluated by X-ray diffractometry, Raman spectroscopy and Transmission ...

    F. Demichelis, G. Crovini, C. F. Pirri, E. Tresso in MRS Online Proceedings Library (1993)

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