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    High Resolution Observation of Void Motion in Passivated Metal Lines Under Electromigration Stress

    Using a 120 kV STEM equipped with a backscattered electron detector and operated as a conventional SEM. voids in metal lines can be detected through 1 μm of passivation. By applying current to passivated thin met...

    Michael C. Madden, Edward V. Abratowski, Thomas Marieb… in MRS Online Proceedings Library (1992)