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Article
Open AccessHighly efficient and aberration-free off-plane grating spectrometer and monochromator for EUV—soft X-ray applications
We demonstrate a novel flat-field, dual-optic imaging EUV—soft X-ray spectrometer and monochromator that attains an unprecedented throughput efficiency exceeding 60% by design, along with a superb spectral res...
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Article
Diffuse volume-discharges without pre-ionization formed in SF6 and C2H6 mixtures
It has been shown that a volume discharge is forming in non-uniform electric-field rough cathode and even anode without pre-ionization in SF6 and C2H6 mixtures. The discharge is presented with many diffuse channe...
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Article
Design and fabrication of soft X-ray multilayer for broadband reflection
A random method used for improving light throughput of a soft X-ray multilayer has been developed in the 18–20 nm spectral region, based on the traditional theory of periodic multilayer, and an 8% gain in inte...