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    Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition

    Al2O3 and AlN nanotubes were fabricated by depositing conformal thin films via atomic layer deposition (ALD) on electrospun nylon 66 (PA66) nanofiber templates. Depositions were carried out at 200°C, using trimet...

    Cagla Ozgit, Fatma Kayaci, Inci Donmez, Engin Cagatay in MRS Online Proceedings Library (2012)