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    MEMS Rubidium atomic vapor cell for miniature atomic resonance device applications

    This paper reports the on-going development of MEMS-based Rubidium vapor cells for miniaturized frequency standard applications. The cells have been fabricated using bulk silicon micromachining process of a 1....

    M. S. Giridhar, M. M. Nandakishor, Apurva Dahake… in ISSS Journal of Micro and Smart Systems (2022)