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  1. Article

    Open Access

    Electron beam lithography on nonplanar and irregular surfaces

    E-beam lithography is a powerful tool for generating nanostructures and fabricating nanodevices with fine features approaching a few nanometers in size. However, alternative approaches to conventional spin coa...

    Chenxu Zhu, Huseyin Ekinci, Aixi Pan, Bo Cui, **aoli Zhu in Microsystems & Nanoengineering (2024)

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