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    Fabrication of Multilayer Mirror Zone Plates and Gratings for Use with Soft X-Rays

    Multilayer mirror gratings and Fresnel zone plates were produced using a multistep process utilizing microfabrication techniques. The gratings were generated by holography and the zone plates by electron beam ...

    C. Khan Malek, T. Moreno, H. Berrouane, J. M. Andre, Ph. Guérin… in X-Ray Microscopy III (1992)