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  1. No Access

    Chapter and Conference Paper

    Molecular Dynamics Modeling of Octadecaborane Implantation into Si

    We have carried out molecular dynamics simulations of monatomic B and octadecaborane cluster implantations into Si in order to make a comparative study and determine the advantages and drawbacks of each approa...

    Luis A. Marqués, L. Pelaz, I. Santos… in Simulation of Semiconductor Processes and … (2007)

  2. No Access

    Chapter and Conference Paper

    Multiscale Modeling of the Implantation and Annealing of Silicon Devices

    Process simulators for silicon devices are benefiting from recent work on several models that cover vastly different length and time scales. In this talk we will focus on molecular dynamics (MD) and Monte Carl...

    G. H. Gilmer, L. Pelaz, C. Rafferty… in Simulation of Semiconductor Processes and … (1998)