Skip to main content

1 Result(s)

within Chapter Remove this filter **a Ting Feng Remove this filter Physics Remove this filter

and

  1. No Access

    Chapter

    Rapid Thermal Processing of Contacts and Buffer Layers for Compound Semiconductor Device Technology

    Rapid Thermal Processing (RTP) in the Compound Semiconductor technology has had a significant impact in making such a technology reliable and manufactureable. Since 1980 [1] RTP has been applied to achieving c...

    Ting Feng, Aris Christou, D. Girginoudi… in Advances in Rapid Thermal and Integrated P… (1996)