Page
%P
![Loading...](https://link.springer.com/static/c4a417b97a76cc2980e3c25e2271af3129e08bbe/images/pdf-preview/spacer.gif)
-
Article
Improved Methods for Evaluation of Rapid Thermal Processors
SEMATECH has worked with numerous commercial suppliers of RTP systems on both evaluation and development projects. It has adopted standardized methods which minimize monitor wafer impact and improve system cha...
-
Article
Commercial RTP - A Sematech Perspective
This paper discusses various commercial aspects of Rapid Thermal Processing (RTP). It provides an overview of SEMATECH’s efforts to improve the manufacturing viability of RTP. Over the past several years SEMAT...