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Polyimide-fixed GaAs Island structure prepared using plasma etching technique
GaAs micromachining technologies were used for fabricating polyimide-fixed thermally insulated GaAs Island structure. This structure, fully compatible with GaAs Heterostructure Field Effect Transistor (HFET) t...
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Article
Advanced patterning techniques for nanodevice fabrication
The key elements in the fabrication of future devices are lithography and pattern transfer. The continuous advances in miniaturization and increasing integration densities are a direct result of improved litho...