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    Ion-bombardment-induced reduction in vacancies and its enhanced effect on conductivity and reflectivity in hafnium nitride films

    Although the role of ion bombardment on electrical conductivity and optical reflectivity of transition metal nitrides films was reported previously, the results were controversial and the mechanism was not yet...

    Zhiqing Gu, Jiafu Wang, Chaoquan Hu, **aobo Zhang, Jianchen Dang in Applied Physics A (2016)