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Surface generation mechanism in ultra-fine microgrinding (UMG) of single crystal silicon considering grinding tool topography
Ultra-fine microgrinding (UMG) with tool diameter of about 100 μm is a promising processing method in producing microstructures, but its service life has always been an important factor restricting its develop...
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Article
Modeling and experimental study on the edge chip** of monocrystalline silicon in ultra-micro-slot-grinding (UMSG) with ultra-micro-grinding (UMG) tools with diameters ~ 100 µm
The edge chip** of monocrystalline silicon in ultra-micro-slot-grinding (UMSG) was investigated. A critical condition model which predicts the appearance of edge chip** and a prediction model which predict...