Abstract
The surface of (111)A HgCdTe has been studied by reflection high-energy electron diffraction and atomic force microscopy (AFM). The as-grown liquid-phase epitaxy (LPE) surface has bilayer (3.7 ± 0.2 Å) step/terrace structures, macro-steps, and cross-hatch patterns. Macro-steps occur about the \([11\bar 2]\) and are from 10–40 Å in height. AFM and x-ray measurements indicate the as-grown epilayer is ≈0.2° off-cut (random polar angle) from the (111). 〈110〉 cross-hatch lines consistent with bilayer (step height=3.9 ± 0.2 Å) {111} slip dislocation are observed. The native oxide/carbon layer for the as-grown LPE (111)A HgCdTe is ≈8 Å. The experimental results suggest that the as-grown LPE surface approximates an equilibrium vicinal crystal structure. The 0.1% Br:ethylene glycol wet chemically etched surfaces retained the macro-step structure, but numerous small protrusions (10–100 Å height, ≈300 Å diameter) developed. The plasma-etched (111)A HgCdTe surface is crystalline, but exhibits surface disorder and is roughened.
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Benson, J.D., Varesi, J.B., Stoltz, A.J. et al. Surface structure of (111)A HgCdTe. J. Electron. Mater. 35, 1434–1442 (2006). https://doi.org/10.1007/s11664-006-0280-0
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DOI: https://doi.org/10.1007/s11664-006-0280-0