Progress in CdZnTe substrate producibility and critical drivers of IRFPA yield originating with CdZnTe substrates

Abstract

With the goal of maximizing the yield of infrared focal plane arrays (IRFPAs), Santa Barbara Research Center’s (SBRC) Infrared Materials Producibility Program (IRMP) has focused on assessing and improving the quality, yield, and throughput of CdZnTe substrates. A baseline detector lot was fabricated to identify the critical drivers of IRFPA yield coming from the substrates and to evaluate the quality and yield of the current vendor base for CdZnTe substrates. Substrate induced defects and impurities that can potentially affect device performance and operability were carefully mapped out in detail on 44 × 67 mm² size substrates, received from IRMP substrate vendors as well as SBRC. This paper will report on the correlations found between this substrate characterization data base and the IRFPA level defect distributions. Key results from these correlation studies are: (1) extended defects found on the substrates with the Nakagawa etch correlated well with responsivity reduction in the final IRFPA; (2) cross-hatch patterns that were evident in the responsivity map correlated well with similar features seen by x-ray topography on LPE double layers; and (3) a possible correlation of device performance (leakage current at 78K) with copper and lithium impurities in the substrate. Recent initiatives toward improving the quality and yield of the substrate growth process have focused on improving purity in the pre-growth charge preparation, modification of growth parameters to reduce defects and scaling up of the vertical Bridgman growth process from its current 67 mm diameter boule size to 92 mm diameter boules. Promising initial results from the large diameter boule growth process will be shown. The 92 mm diameter CdZnTe boule (6 kg charge) shows two predominant single crystal grains encompassing 75% of boule volume. Defect characterization of boules grown under baseline and modified conditions is discussed.