Abstract
Historically the microscope has proved to be one of the most powerful scientific tools. This has been especially true in the biological sciences where many of the most significant advances have been founded on microscopic observations. Moreover, each time a microscope based on a new class of radiation has been developed, our understanding of the microscopic structure in nature has been extended. The introduction of acoustic radiation to microscopy can be expected to have a similar impact. This is the motivation underlying the development of the acoustic microscope.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
R. A. Lemons and C. F. Quate, Appl. Phys. Lett. 24, 163–165 (1974).
L. W. Kessler, J. Acoust. Soc. Am. 55, 909–918 (1974).
E. Bridoux, B. Nongaillard, J. M. Rouvaen, C. Bruneel, G. Thomin and R. Torguet, J. Appl. Phys. 49, 574–579 (1978).
J. Attal and C. F. Quate, J. Acoust. Soc. Am. 59, 69–73 (1976).
C. F. Quate, Trends in Biochemical Sciences, N 127-N 129 (June 1977).
R. A. Lemons and C. F. Quate, Appl. Phys. Lett. 25, 251–253(1974).
C. S. Tsai, S. K. Wang and C. C. Lee, Appl. Phys. Lett. 31, 317–320 (1977).
J. Attal and G. Cambon, Electron. Lett. 14, 472–473 (1978).
H. K. Wickramasinghe and M. Hall, Electron. Lett. 12, 637–638 (1976).
R. D. Weglein and R. G. Wilson, Appl. Phys. Lett. 31, 793–796 (1977).
A. Atalar, C. F. Quate and H. K. Wickramasinghe, Appl. Phys. Lett. 31, 791–793 (1977).
J. Attal and G. Cambon, Submitted to Appl. Phys. Lett.
R. Kompfner and R. A. Lemons, Appl. Phys. Lett. 28, 295–297 (1976).
H. K. Wickramasinghe and C. Yeack, J. Appl. Phys. 48, 4951–4954 (1977).
W. L. Bond, and C. C. Cutler, R. A. Lemons and C. F. Quate, Appl. Phys. Lett. 27, 270–272 (1975).
J. Attal and G. Cambon, Application to the Non-Destructive Evaluation in Microelectronics, UltraSonic Symposium Proceedings IEEE #78 CH1344–15U (1978) (to be published).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1979 Springer Science+Business Media New York
About this chapter
Cite this chapter
Attal, J. (1979). The Acoustic Microscope: A Tool for Nondestructive Testing. In: Zemel, J.N. (eds) Nondestructive Evaluation of Semiconductor Materials and Devices. NATO Advanced Study Institutes Series, vol 46. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-1352-7_12
Download citation
DOI: https://doi.org/10.1007/978-1-4757-1352-7_12
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4757-1354-1
Online ISBN: 978-1-4757-1352-7
eBook Packages: Springer Book Archive